C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 14/04 (2006.01) B81B 7/00 (2006.01) B81C 1/00 (2006.01) C23C 14/08 (2006.01) C23C 14/16 (2006.01) C23C 16/04 (2006.01) C23C 16/06 (2006.01) C23C 16/40 (2006.01) H01L 21/68 (2006.01) H01L 23/26 (2006.01)
Patent
CA 2450412
The invention is about a support for the production of microelectronic, microoptoelectronic or micromechanical devices. Said support (10; 60) comprises a base (11; 61) having the function of backing element, on which is deposited a getter material or drier material in form of discrete deposits (13, 13', ...; 63, 63', ...) that are at least partially exposed to the atmosphere present around said support (10; 60).
L'invention concerne un support de production de dispositifs microélectroniques, micro-optoélectroniques ou micromécaniques. Ledit support (10; 60) comprend une base (11; 61) servant d'élément d'appui, sur laquelle est déposé un matériau d'absorption de gaz sous forme de dépôts discrets (13, 13',...; 63, 63',...) au moins partiellement exposés à l'atmosphère autour dudit support (10; 60).
Gowling Lafleur Henderson Llp
Saes Getters S.p.a.
LandOfFree
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