Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

H - Electricity

03

H

333/58, 333/89,

H03H 9/145 (2006.01) H03H 9/02 (2006.01)

Patent

CA 2014675

ABSTRACT OF THE DISCLOSURE Interdigital transducers and reflectors are formed on a piezoelectric substrate by an aluminum film. The aluminum film is crystallographically oriented in a constant direction, whereby stressmigration of the aluminum film is suppressed.

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