H - Electricity – 01 – L
Patent
H - Electricity
01
L
73/3, 73/67, 73/
H01L 41/08 (2006.01) B60R 13/10 (2006.01) G01L 9/00 (2006.01) G01L 9/08 (2006.01)
Patent
CA 1122429
IMPROVED SURFACE ACOUSTIC WAVE (SAW) PRESSURE SENSOR STRUCTURE ABSTRACT OF THE DISCLOSURE An improved SAW pressure sensor structure includes a dual substrate sensor having a SAW substrate with a SAW delay line disposed in an active signal region on a first one of two parallel major surfaces thereof, and having a centrally apertured base substrate of the same material bonded at a mating surface thereof to the second one of the SAW substrate major surfaces with a glass seal, the dual substrates being bonded in crystallographic orientation, the central aperture having segmented portions to provide a major diameter opening at the mating surface coextensive with the active signal region to form a diaphragm and having a minor diameter opening at a second surface of the base substrate at a value less than one half that of the major diameter, the base substrate further including an O-ring groove adapted to receive one end of a cylindrical metal sleeve in a vacuum sealing relationship, the metal sleeve having a diameter equal to one half that of the aperture major diameter, the sleeve being bonded at another end to an orifice formed in one wall of a vacuum sealing enclo- sure adapted to receive the SAW sensor to provide a fluid conduit for external pressure signals between the orifice and the diaphragm formed in the SAW sensor.
341636
Swabey Ogilvy Renault
United Technologies Corporation
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