Surface acoustic wave (saw) pressure sensor structure

Details Surface acoustic wave (saw) pressure sensor structure Surface acoustic wave (saw) pressure sensor structure

G - Physics

01

L

73/67, 73/8

G01L 7/08 (2006.01) G01L 9/00 (2006.01)

Patent

CA 1126975

SURFACE ACOUSTIC WAVE (SAW) PRESSURE SENSOR STRUCTURE ABSTRACT OF THE DISCLOSURE A surface acoustic wave (SAW) pressure sensor is mecha- nically supported within a vacuum sealing structure by a cylindrical metal sleeve which isolates the SAW sensor sub- strate from induced thermal strain resulting from temperature cycling of the structure, and which provides for a fluid con- duit through the vacuum environment from the sensor diaphragm to an orifice formed through the wall of the structure.

341637

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