Surface defect detection and confirmation system and method

Details Surface defect detection and confirmation system and method Surface defect detection and confirmation system and method

G - Physics

01

N

340/124.6

G01N 21/88 (2006.01) G01N 21/95 (2006.01)

Patent

CA 1271538

ABSTRACT OF DISCLOSURE A surface inspection defect detection and confirmation technique in which a beam of radiation is directed at the surface to be inspected; the radiation scattered from the surface is separately sensed in the near-specular region indicative of a pit and in the far-specular region indicative of a flaw, the near-specular region signal and far-specular region signal are normalized, the near-specular component is discriminated, and the flaw signal is indicated as being a defect and not contamination when there is coincidence between the pit signal and flaw signal. QC-102C

562332

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