B - Operations – Transporting – 24 – B
Patent
B - Operations, Transporting
24
B
51/78, 342/42.3
B24B 7/16 (2006.01) B24B 49/16 (2006.01)
Patent
CA 1307116
SO2-47448M/MS/87 ABSTRACT OF THE DISCLOSURE A surface grinding-machine comprises a wheel head vertically movably supported; a cup-shaped diamond wheel supported by a rotatable wheel shaft at one end of the wheel head and having an abrasive grain layer of Young's modulus (10 - 15) x 104 kgf/cm2 at the lower end of the wheel; a wheel shaft driving motor for rotating the cup- shaped diamond wheel supported by the wheel head; a servomotor for vertically moving the wheel head; a suitable number of chuck tables for fixing the surface of a III-V group compound semiconductor wafer on which elements have been fabricated; an index table for rotatably supporting the chuck tables a chuck table driving motor for turning the chuck tables; a main shaft motor current analysis circuit for detecting the current value of the wheel shaft driving motor; a main shaft rotation number analysis circuit for detecting the number of rotations of the wheel shaft driving motor, and a feed speed control circuit for controlling the servomotor in such a manner as to decrese the feed speed when the grinding resistance is greater than a predetermined resistance value, and increase the feed speed when the grinding resistance is smaller than the predetermined resistance value.
553778
Miyoshi Ikkei
Nishiguchi Masanori
Nishio Kiyoshi
Sekiguchi Takeshi
Asahi Diamond Industrial Co. Ltd.
Nissei Industry Corp.
Riches Mckenzie & Herbert Llp
Sumitomo Electric Industries Ltd.
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