Surface inspection and characterization system and process

Details Surface inspection and characterization system and process Surface inspection and characterization system and process

G - Physics

01

B

G01B 11/30 (2006.01) G01B 11/06 (2006.01) G01N 21/27 (2006.01) G01N 21/35 (2006.01) G01N 21/47 (2006.01) G01N 21/55 (2006.01) G01N 21/88 (2006.01) G01N 21/94 (2006.01) G01N 21/84 (2006.01) G01N 21/93 (2006.01)

Patent

CA 2150108

A system and process for obtaining near real time, non-destructive inspection and charac- terization of surfaces. The system (10) includes an infrared light source (14) which is directed on a surface (18) to be inspected. A portion of the re- flected light (54) is gathered and directed through an optical filter arrangement (26, 28) which sep- arates the light into a plurality of sets of weave- lengths which correspond to particular physical properties of the thin film, such as absorbance. The intensity of each set of wavelengths is de- tected by optical detectors (32, 34, 36) and the reslulting signals analyzed to characterized the sur- face.

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