Surface inspection method and apparatus thereof

Details Surface inspection method and apparatus thereof Surface inspection method and apparatus thereof

G - Physics

01

N

G01N 21/88 (2006.01) G01N 21/952 (2006.01)

Patent

CA 2051032

ABSTRACT OF THE DISCLOSURE A surface inspection method and apparatus thereof are disclosed in which a portion of an outer round surface of an object to be inspected is obliquely irradiated with a diffused light from a light source in a direction perpendicular to the center axis of the object, the outer round surface being ground in its circumferential direction, the irradiated portion of the outer round surface of the object is picked up by optical photosensing means located along a path of light reflected on the irradiated portion, and the video signal from the optical photosensing means is processed by a signal processor to thereby detect a flaw on the outer round surface of the object.

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