H - Electricity – 05 – H
Patent
H - Electricity
05
H
358/25
H05H 1/46 (2006.01)
Patent
CA 1273440
ABSTRACT The present invention relates to a device for generating plasma (ionizing gas) by a propagating surface wave. The device comprises a wave launching structure mounted on a plasma vessel and connected to an impedance matching network. The latter comprises a coupler and a tuner which is either formed by a section of a transmission line or is of the lumped circuitry type. The launching structure may either generate an azimuthally symmetric or a non symmetric propagating wave. This invention also relates to a method and a device for shaping plasma which comprises a plasma vessel receiving a surface wave generator and having a usable portion of a size and/or shape substantially different from the shape and/or size of the portion of the plasma vessel receiving the wave generator.
578902
Moisan Michel
Zakrzewski Zenon
Air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Geor
Goudreau Gage Dubuc
Universite de Montreal
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