H - Electricity – 05 – H
Patent
H - Electricity
05
H
358/25
H05H 1/46 (2006.01)
Patent
CA 1246762
ABSTRACT The present invention relates to a device for generating plasma by sustaining a gaseous discharge in an electric field of a propagating surface wave. The device comprises a wave launching structure emitting antenna mounted on a plasma vessel discharge tube and a detachable impedance matching network. The latter comprises either a coupler and a tuner which is formed by a section of a transmission line or is a network formed by lumped- parameter elements. The launching structure may excite either an azimuthally symmetric or a non symmetric propagating wave. This invention also relates to a method and a device for shaping plasma which comprises a plasma vessel receiving a surface wave launcher and having a useable portion of a size and/or shape substantially different from the size and/or shape of the portion of the plasma vessel receiving the wave launcher.
486389
Moisan Michel
Zakrzewski Zenon
Air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Geor
Goudreau Gage Dubuc
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