Susceptor assembly

Details Susceptor assembly Susceptor assembly

C - Chemistry, Metallurgy

23

C

32/24

C23C 10/14 (2006.01) C23C 16/458 (2006.01) C30B 25/12 (2006.01)

Patent

CA 1212829

SUSCEPTOR ASSEMBLY ABSTRACT OF THE DISCLOSURE A susceptor for holding substrates during a high temperature vapor deposition process is constructed from separable top, bottom and side plates interlocked to each other in a gravity maintained assembly,

457564

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