Synthetic diamond film with reduced bowing and method of...

C - Chemistry – Metallurgy – 23 – C

Patent

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C23C 16/26 (2006.01) C23C 16/01 (2006.01) C23C 16/02 (2006.01) C23C 16/04 (2006.01) C23C 16/27 (2006.01)

Patent

CA 2144924

The undesirable bowing of relatively large area diamond films is reduced by reducing the severe non- uniform intrinsic stress distribution across the diamond thickness that causes the diamond to bow after it is released from the substrate.

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