Synthetic imaging technique

Details Synthetic imaging technique Synthetic imaging technique

G - Physics

03

B

356/165, 88/70,

G03B 41/00 (2006.01) G02B 17/00 (2006.01) G02B 27/46 (2006.01) G03F 7/20 (2006.01) H01L 21/027 (2006.01)

Patent

CA 1321717

MI-3788 ABSTRACT OF THE DISCLOSURE SYNTHETIC IMAGING TECHNIQUE An optical system wherein a mask pattern occurring at a predetermined period is imaged with a period less than the predetermined period. Spatial filter means are disposed within the optical system for permitting only the two positive and negative first orders of light from an illumination source diffracted by the mask pattern to pass therethrough.

598340

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