System and method for canceling disturbance in mems devices

Details System and method for canceling disturbance in mems devices System and method for canceling disturbance in mems devices

G - Physics

02

B

G02B 6/26 (2006.01) G02B 6/42 (2006.01)

Patent

CA 2562087

A system and method for canceling disturbance in a MEMS device. The system 200 includes a MEMS device 203, which may include a substrate 205 and a plurality of individually movable MEMS elements 203-1 through 203-N, and a control assembly 207. The optical system 200 may be utilized in and/or form a portion of any optical apparatus employing an array of MEMS devices. The control assembly 207 uses feed-forward control signals to cancel disturbance in the MEMS device 203, and more particularly, to cancel disturbance in the non- switched or static mirrors of the MEMS device 203 caused by switched or moving mirrors.

L'invention concerne un système et un procédé destinés à éliminer les perturbations dans un dispositif MEMS. Ce système (200) comprend un dispositif MEMS (203), qui peut comporter un substrat (205) et plusieurs éléments MEMS mobiles séparément (203-1 à 203-N), et un ensemble de commande (207). Le système optique (200) peut être utilisé dans une partie de n'importe quel appareil optique utilisant un réseau de dispositifs MEMS et/ou former une partie de celui-ci. L'ensemble de commande (207) utilise des signaux de régulation par l'amont afin d'éliminer les perturbations dans le dispositif MEMS (203), et plus particulièrement, afin d'éliminer les perturbations dans des miroirs non commutés ou statiques du dispositif MEMS (203) provoquées par des miroirs commutés ou mobiles.

Affiliated with

Also associated with

Rating

System and method for canceling disturbance in mems devices does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System and method for canceling disturbance in mems devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for canceling disturbance in mems devices will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1482256