System and method for micro-electromechanical operating of...

G - Physics – 02 – B

Patent

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Details

IPC codes

G02B 26/00 (2006.01)

Type

Patent

Patent number

CA 2575314

Description

An interferometric modulator is formed by a stationary layer and a mirror facing the stationary layer. The mirror is movable between the undriven and driven positions. Landing pads, bumps or spring clips are formed on at least one of the stationary layer and the mirror. The landing pads, bumps or spring clips can prevent the stationary layer and the mirror from contacting each other when the mirror is in the driven position. The spring clips exert force on the mirror toward the undriven position when the mirror is in the driven position and in contact with the spring clips.

La présente invention a trait à un modulateur interférométrique formé par une couche stationnaire et un miroir en regard de la couche stationnaire. Le miroir est mobile entre des positions commandée et non commandée. Des plages d'accueil, des bosses ou des brides à ressort sont formés sur au moins un parmi la couche stationnaire et le miroir. Les plages d'accueil, bosses ou brides à ressort peuvent interdire le contact entre la couche stationnaire et le miroir lorsque le miroir se trouve en position commandée. Les brides à ressort exercent une force sur le miroir vers la position non commandée lorsque le miroir se trouve dans la position commandée et en contact avec la brides à ressort.

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