G - Physics – 01 – D
Patent
G - Physics
01
D
G01D 5/28 (2006.01) G01M 11/08 (2006.01) G01Q 60/24 (2010.01) G01Q 70/18 (2010.01) B82Y 15/00 (2011.01)
Patent
CA 2626230
The invention relates to a system for the inspection of surfaces, which is configured to detect vibration and/or relative displacement characteristics at different points of various elements (51) forming part of a mechanical structure (5), such as a micro or nanomechanical structure. According to the invention, a light beam is moved by the mechanical structure along a first path (A) in order to detect different successive reference positions (C) along the length of said path (A) and the light beam is also moved by the mechanical structure along various secondary paths (B) which are each associated with one of the aforementioned reference positions (C). In addition, the invention relates to a corresponding method and a program for performing said method.
Le système d'inspection de surfaces selon l'invention est configuré pour détecter des caractéristiques de déplacement relatif et/ou de vibration de différents points de divers éléments (51) qui font partie d'une structure mécanique (5), telle qu'une structure micro ou nanomécanique. Selon l'invention, un faisceau lumineux se déplace dans la structure mécanique le long d'une première trajectoire (A) pour détecter différentes positions de référence successives (C) le long de ladite trajectoire (A), et le faisceau lumineux est également déplacé par la structure mécanique le long de différentes trajectoires secondaires (B), qui sont toutes associées à une desdites trajectoires secondaires (B) avec une desdites positions de références mentionnées auparavant (C). L'invention concerne également un procédé correspondant et à un programme permettant de mettre en oeuvre ledit procédé.
Calleja Gomez Montserrat
Mertens Johan
Tamayo de Miguel Francisco Javier
Consejo Superior de Investigaciones Cientificas
Marks & Clerk
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