System and method of eliminating interference for impurities...

G - Physics – 01 – N

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G01N 21/71 (2006.01) B01D 53/04 (2006.01) G01N 21/69 (2006.01)

Patent

CA 2643094

The invention provides a system and a method of eliminating interference for impurities measurement in noble gases based on emission spectroscopy which provide very stable, sensitive and interference free results. The method mainly relies on the use of a combination of particularly designed means serially connected for cancelling interferences and proper means for correcting linearity issues. The proposed method is particularly advantageous since it offers long- term stability while providing very accurate and reliable results, even at sub-ppb and up to 10,000 ppm levels, whatever the surrounding conditions and the additional impurities that could be present in the gas under analysis.

L'invention concerne un système et un procédé d'élimination d'interférences en vue de mesurer des impuretés dans des gaz nobles basés sur la spectroscopie d'émission qui fournit des résultats sans interférence, très stables, et efficaces. Le procédé repose principalement sur l'utilisation d'une combinaison de moyens connectés en série et particulièrement conçus pour éliminer les interférences et des moyens appropriés destinés à corriger les problèmes de linéarité. Le procédé proposé est particulièrement avantageux puisqu'il offre une stabilité à long terme, tout en offrant des résultats très précis et fiables, même à des niveaux inférieurs à la partie par milliard et jusqu'à 10000 parties par million, quelles que soient les conditions environnantes et les impuretés supplémentaires pouvant être présentes dans le gaz sous analyse.

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