System and method of slurry treatment

Details System and method of slurry treatment System and method of slurry treatment

C - Chemistry, Metallurgy

02

F

C02F 1/42 (2006.01)

Patent

CA 2617270

Wastewater streams from semiconductor processing operations are treated to reduce the concentration therein of one or more metal species to a satisfactory level. The disclosed systems and technique utilize complexing ion exchange media to treat the wastewater streams having a significant concentration of oxidizing species.

Des flux d'eaux usées en provenance d'opérations de traitement de semi-conducteurs sont traitées afin de réduire la concentration dans ceux-ci d'une ou de plusieurs espèces chimiques métalliques à un niveau satisfaisant. Les systèmes et la technique de l'invention utilisent un milieu d'échange d'ions complexants pour traiter ces flux d'eaux usées possédant une concentration importante d'espèces chimiques oxydantes.

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