System and method of slurry treatment

Details System and method of slurry treatment System and method of slurry treatment

B - Operations, Transporting

01

D

B01D 15/04 (2006.01) C02F 1/42 (2006.01)

Patent

CA 2662121

Wastewater streams from semiconductor processing operations are treated to reduce the concentration therein of one or more metal species to a satisfactory level. The disclosed systems and technique utilize complexing ion exchange media to treat the wastewater streams having a significant concentration of oxidizing species and high solids concentration.

Dans le cadre de la présente invention, des courants d'eaux usées qui proviennent d'opérations de traitement de semi-conducteur sont traités pour en réduire la concentration en une ou plusieurs espèces de métal jusqu'à un niveau satisfaisant. Les systèmes et la technique décrits utilisent des agents complexants d'échange d'ions pour traiter les courant d'eaux usées qui présentent une concentration importante en espèces oxydantes et une concentration élevée en matières solides.

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