System for controlling flow through a process region

Details System for controlling flow through a process region System for controlling flow through a process region

G - Physics

05

D

G05D 7/00 (2006.01) F25B 21/02 (2006.01) F25B 39/04 (2006.01) G01L 19/00 (2006.01)

Patent

CA 2272180

A regulator for maintaining a constant partial vacuum in a region includes a path, through which fluid passes from the region to a vacuum source, and a piston movably mounted at a constriction point. The piston has a frontal face, exposed to fluid in the path upstream of the constriction point. A piston distal face, exposed to a reference pressure, such as the pressure of region and piston weight tends to widen the path at the constriction point. A force is exerted on the piston by a spring under compression, in a direction that tends to narrow the path at the constriction point. A buffering gas, introduced to the area between the piston's skirt and the piston mounting structure, may be used to keep fumes from backing up into the region and/or to provide a bearing.

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