H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/00 (2006.01) H01L 21/677 (2006.01)
Patent
CA 2497310
The invention relates to a system of transporting and storing containers (1) of semiconductor wafers, which is intended to be used in a bay (2) of a wafer factory, said bay comprising one or more wafer processing tools (3, 4). The aforementioned processing tools comprise a front face (5, 6) with at least one opening (7) which is used to load/unload wafers and which can be connected to a wafer container (1), all of said loading/unloading openings being essentially disposed in a vertical plane (8). Moreover, a bay conveyor (9) is used to supply containers to the bay, said conveyor being disposed above the processing tools in parallel with the vertical plane. The inventive system comprises: means (10) of storing containers in a space (11) which is located above the processing tools and which is set back from the above-mentioned openings; means (12) of temporarily supporting at least one container, which project out from the front face (5, 6) of the processing tools and which are in line with the bay conveyor, such that the space above the openings is left free; first means (13) of transferring containers from the temporary support means towards the storage means and vice versa; second means (13) of transferring containers from the storage means towards the openings and vice versa; and third means (13) of transferring containers from the temporary support means towards the openings and vice versa. The invention also relates to a transfer mechanism (13).
Système de transport et de stockage de conteneurs (1) de plaques de semi- conducteur, destiné à être utilisé dans une travée (2) d'une fabrique desdites plaques, la travée comprenant un ou plusieurs outils (3, 4) de traitement des plaques, les outils de traitement comportant respectivement une face avant (5, 6) munie d'au moins une ouverture (7) de chargement/déchargement des plaques apte à être associée à un conteneur (1) de plaques, l'ensemble des ouvertures de chargement/déchargement étant sensiblement compris dans un plan vertical (8), ladite travée étant alimentée en conteneurs par un transporteur de travée (9) situé au dessus des outils de traitement et parallèle au dit plan vertical, ledit système comprenant: des moyens de stockage (10) des conteneurs dans un espace (11) situé au dessus desdits outils de traitement et en retrait vers l'arrière desdites ouvertures, des moyens de support temporaire (12) d'au moins un conteneur, saillant en face avant (5, 6) des outils de traitement, situés à l'aplomb du transporteur de travée apte à laisser libre l'espace sis au dessus desdites ouvertures, des premiers moyens de transfert (13) des conteneurs à partir des moyens de support temporaire vers le moyens de stockage, et inversement, des deuxièmes moyens de transfert (13) des conteneurs à partir des moyens de stockage vers lesdites ouvertures et inversement, des troisièmes moyens de transfert (13) des conteneurs à partir de moyens de support temporaire vers lesdites ouvertures, et inversement. L'invention se rapporte en outre à un mécanisme de transfert (13).
Gaudon Alain
Haddad Florent
Lero Christophe
Poli Bernard
Moffat & Co.
Recif
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