Systems and methods for nanowire growth and harvesting

Details Systems and methods for nanowire growth and harvesting Systems and methods for nanowire growth and harvesting

H - Electricity

01

L

H01L 21/20 (2006.01)

Patent

CA 2564220

The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrifical growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.

Cette invention concerne des systèmes et des procédés de croissance et de culture de nanofils. Dans un mode de réalisation, cette invention concerne des procédés de croissance et de dopage de nanofils, y compris des procédés de croissance de nanofils à orientation épitaxiale utilisant une combinaison de précurseurs de silicium. Dans un autre de ses aspects, cette invention concerne des procédés permettant d'améliorer la qualité de nanofils grâce à l'utilisation de couches de croissance sacrificielles. Dans un autre de ses aspects, cette invention concerne des procédés servant à transférer des nanofils d'un substrat à un autre.

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