Systems and methods for nanowire growth and manufacturing

H - Electricity – 01 – L

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H01L 21/322 (2006.01)

Patent

CA 2562148

The present invention is directed to compositions of matter, systems, and methods to manufacture nanowires. In an embodiment, a buffer layer is placed on a nanowire growth substrate and catalytic nanoparticles are added to form a catalytic-coated nanowire growth substrate. Methods to develop and use this catalytic-coated nanowire growth substrate are disclosed. In a further aspect of the invention, in an embodiment a nanowire growth system using a foil roller to manufacture nanowires is provided.

La présente invention a trait à des compositions de matière, des systèmes, et des procédés pour la fabrication de nanofils métalliques. Dans un mode de réalisation, une couche tampon est disposée sur un substrat de croissance de nanofils métalliques et des nanoparticules catalytiques sont ajoutées pour former un substrat de croissance de nanofils métalliques à revêtement catalytique. L'invention a également trait à des procédés pour le développement et l'utilisation de ce substrat de croissance de nanofils métalliques. Dans un autre mode de réalisation, l'invention a trait à un système de croissance de nanofils métalliques utilisant un laminoir de feuille mince pour la fabrication de nanofils métalliques.

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