Target for use in mask alignment

Details Target for use in mask alignment Target for use in mask alignment

H - Electricity

01

L

356/194

H01L 21/70 (2006.01) G03F 9/00 (2006.01)

Patent

CA 1159578

EO-2399 TARGET FOR USE IN MASK ALIGNMENT ABSTRACT A target for use in aligning masks used in producing microcircuits which is of a size that can be printed on a microcircuit chip without interfering with the lines thereon, consisting only of lines vertically or diagonally disposed with respect to the image transducer is disclosed. Also disclosed is an automatic system for aligning such targets.

416530

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