Target holding apparatus

Details Target holding apparatus Target holding apparatus

C - Chemistry, Metallurgy

23

C

C23C 14/50 (2006.01)

Patent

CA 2577757

An apparatus for the attachment of a target or target segment (9) of a coating source includes a target or target segment (9) and a target holder (1) which includes a cooling body (3) and connecting means (6,7,8,11) for the attachment of the target or target segment to the cooling body. The connecting means include (3,6,7,8,10,11) electrically and/or thermally conductive means, so that the power supply takes place in a uniform dis-tribution across the target or target segment, and also the heat arising at the target or target segment during the coating method can be uniformly conducted away into the cooling body, by which means more power can be coupled into the coating source and the coating rate is raised.

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