Temperature compensated optical pressure sensor

Details Temperature compensated optical pressure sensor Temperature compensated optical pressure sensor

G - Physics

01

L

73/4

G01L 11/00 (2006.01) G01L 9/00 (2006.01) G01L 11/02 (2006.01)

Patent

CA 1220048

- 18 - Abstract Temperature Compensated Optical Pressure Sensor An integrated optical pressure transducer having a diaphragm fabricated from a low-loss glass is positioned at the location where pressure changes are to be measured. An optical waveguide loop formed on one surface of the diaphragm acts as a ring cavity in which the difference between the resonating frequencies varies with pressure but not with temperature. Light energy is coupled into the waveguide loop from an optical source through a tangentially located input waveguide. An output waveguide, also tangentially located, couples light energy from the waveguide loop to a broadband detector so that the changes in frequency spectrum of the resonating frequencies within the waveguide loop can be monitored.

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