C - Chemistry – Metallurgy – 30 – B
Patent
C - Chemistry, Metallurgy
30
B
148/3.6
C30B 29/60 (2006.01) H01L 41/18 (2006.01) H03H 9/02 (2006.01)
Patent
CA 1233094
ABSTRACT TEMPERATURE COMPENSATED ORIENTATIONS OF BERLINITE FOR SURFACE ACOUSTIC WAVE DEVICES A piezoelectric wafer of single crystal berlinite, having a surface defined by an X-axis boule cut at an angle in the range from about 94°-104°, provides an improved substrate for a surface acoustic wave device. These cut angles are relatively easy to fabricate, provide excellent temperature compensation in a range from -55°C to 125°C, and have high piezoelectric coupling coefficient.
465289
Andle Jeffrey C.
Bailey Dana S.
Chai Bruce H.
Lee Donald L.
Vetelino John F.
Allied Corporation
Gowling Lafleur Henderson Llp
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