Test system for vlsi digital circuit and method of testing

Details Test system for vlsi digital circuit and method of testing Test system for vlsi digital circuit and method of testing

G - Physics

01

R

356/188, 356/9

G01R 31/28 (2006.01) G01R 31/308 (2006.01)

Patent

CA 1222329

ABSTRACT OF THE DISCLOSURE A method of testing the conductive state of a transistor in a semiconductor integrated circuit compris- ing the steps of applying electrical power through load means to the integrated circuit, applying a clock signal to the integrated circuit, stopping the clock signal at a predetermined time period, irradiating the transistor with a focused radiation beam, and measuring change in current applied to the integrated circuit by correlated double sampling whereby voltages at either end of the load means are capacitively coupled to differential amplification means measuring change in voltage at either end of the load means. Also disclosed is a test apparatus for carrying out the method.

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