Tetrode electron gun for electron beam columns

Details Tetrode electron gun for electron beam columns Tetrode electron gun for electron beam columns

H - Electricity

01

J

H01J 49/08 (2006.01) H01J 3/02 (2006.01) H01J 37/063 (2006.01)

Patent

CA 2325653

Conventional electron guns in electron beam columns utilize a thermionic triode configuration. A tetrode (four electrode) gun is described which allows the adjustment of both variable high brightness and illumination uniformity in the profile of the electron beam. This is achieved by adding an electrostatic focusing electrode between the cathode and the anode within the electron gun. The focusing electrode is positively biased to a few keV and allows the image of the cathode to be focused at infinity. The addition of a focusing electrode enables both variable brightness and illumination uniformity by adjustment of the bias of a grid which is mounted below the cathode to maintain constant emission. while adjusting the bias of the focusing electrode to obtain the optimal beam cross-sectional uniformity.

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