Thermal diffusion fluid flow sensor

Details Thermal diffusion fluid flow sensor Thermal diffusion fluid flow sensor

G - Physics

01

F

73/63, 73/74

G01F 1/68 (2006.01) G01F 1/684 (2006.01) G01F 1/708 (2006.01) G01P 5/10 (2006.01)

Patent

CA 1230754

THERMAL DIFFUSION FLUID FLOW SENSOR Abstract of the Disclosure: A miniature solid state fluid flow sensor has a low diffusivity substrate, such as a polymer film, which is optionally mounted on a thermally conductive base. A resistor strip on the substrate is connected to an electrical oscillator and thus emits thermal waves which are propagated through the fluid at a rate dependent on a fluid flow component perpendicular to the strip. A thermoelectric detector, spaced from one side or each side of the strip, senses the thermal waves; and detector circuitry determines the time or phase shift due to fluid flow.

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