G - Physics – 01 – J
Patent
G - Physics
01
J
G01J 5/10 (2006.01) G01J 5/20 (2006.01) H01L 31/0224 (2006.01) H01L 31/18 (2006.01)
Patent
CA 2518841
The absorbent membrane (1) of the detector is fixed in suspension by at least one thermally insulating support part (5ab) onto a front face of a substrate (2) comprising at least two electric connection terminals (3) electrically connected to the membrane (1), for example by means of conducting layers (9). The support part (5ab) has at least one base end (6) and a raised zone (7). The base end (6) is fixed to a top part of a conducting pillar (8) having a base fixedly secured to one of the electric connection terminals (3). A substantially flat zone of a bottom face of the membrane (1) is directly in contact with the raised zone (7) of the support part (5ab). The support part (5ab) is preferably formed by a bridge having a second base end (6) fixed to a top part of a second pillar (8), the raised zone (7) being formed by a flat middle part of the bridge.
Astier Astrid
Vilain Michel
Yon Jean-Jacques
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