Thermal evaporation in two planes

Details Thermal evaporation in two planes Thermal evaporation in two planes

C - Chemistry, Metallurgy

23

C

C23C 14/26 (2006.01) C23C 14/24 (2006.01) C23C 14/50 (2006.01)

Patent

CA 2087151

Vacuum metallizing substrates having both vertical and horizontal surfaces occurs by directing metal from two remote sources by thermal evaporation. One source is connected horizontally below the object to depose metal vertically toward the object to the horizontal surface thereof. The second source is connected vertically to the object to depose metal horizontally toward the object to the vertical surface thereof. A vacuum chamber contains a rotating carousel supporting the objects with the sources located fixedly within the chamber to perform the thermal evaporation.

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