Thermal isolation microstructure

Details Thermal isolation microstructure Thermal isolation microstructure

G - Physics

01

J

G01J 5/20 (2006.01) H01L 31/024 (2006.01)

Patent

CA 2116678

A thermal isolation microstructure fabricated by a process which allows the ultra thinning of support legs for the microdetector.

Microstructure d'isolation thermique fabriquée selon un processus permettant de rendre très minces les pieds de support pour le microdétecteur.

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