Thermally controlled sputtering of high anisotrophy magnetic...

Details Thermally controlled sputtering of high anisotrophy magnetic... Thermally controlled sputtering of high anisotrophy magnetic...

C - Chemistry, Metallurgy

23

C

204/96.1

C23C 14/16 (2006.01) C23C 14/34 (2006.01) C23C 14/38 (2006.01) H01F 41/18 (2006.01)

Patent

CA 1229066

Abstract of the Disclosure A substrate coating of a ferromagnetic alloy of a rare earth-transition element mixture is prepared by a hollow cathode sputtering deposition method to produce near single domain films on various substrates.

461807

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