Thermally stable multilayer mirror for the euv spectral range

Details Thermally stable multilayer mirror for the euv spectral range Thermally stable multilayer mirror for the euv spectral range

G - Physics

02

B

G02B 5/08 (2006.01) G02B 1/10 (2006.01) G21K 1/06 (2006.01)

Patent

CA 2591530

The invention relates to a multilayer mirror (1) for reflecting EUV radiation, which contains a number of alternating molybdenum layers (4) and silicon layers (3). According to the invention, a barrier layer (5) is placed on a number of boundary surfaces between the molybdenum layers (4) and the silicon layers (3) and contains a silicon nitride or a silicon boride. A high thermal stability, particularly a high long-time stability at temperatures of greater than 3,000 ~C with a simultaneously high degree of reflection of the multilayer mirror is achieved by the barrier layers (5) made of a silicon nitride or a silicon boride. A multilayer mirror (1) of the aforementioned type can be used, in particular, as a heatable collector mirror of an EUV radiation source.

L'invention concerne un miroir multicouche (1) destiné à réfléchir un rayonnement ultraviolet extrême, qui contient une pluralité de couches de molybdène (4) et de couches de silicium (3) alternées. Une couche barrière (5) est disposée dans chaque cas sur plusieurs interfaces entre les couches de molybdène (4), qui contient un nitrure de silicium ou un borure de silicium. Une grande stabilité thermique est obtenue, notamment une grande stabilité à long terme, par les couches barrières (5) à base d'un nitrure de silicium ou d'un borure de silicium, à des températures de plus de 300 °C, avec simultanément une réflexion élevée du miroir multicouche. Un miroir multicouche (1) de ce type peut s'utiliser notamment comme miroir collecteur de source de rayonnement ultraviolet extrême, qui peut être chauffé.

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