Thermoelectric sensor

Details Thermoelectric sensor Thermoelectric sensor

G - Physics

01

K

G01K 7/04 (2006.01) G01J 5/12 (2006.01)

Patent

CA 2230545

Thermoelectric sensor (12) formed by a membrane (14) including a plurality of thermoelectric elements (20) formed of a plurality of thermoelectric couples and forming a plurality of elementary cells. Each elementary cell is thermally insulated from adjacent elementary cells by metal wires (22, 23), preferably gold wires, arranged on the front face (25) of the membrane (14), more particularly, on an upper passivation layer (30). The metal wires (22 and 23) are thermally connected to a substrate (16) supporting said membrane. The two wires separating two adjacent thermoelectric elements (20) are separated from each other by an intermediate low thermal conduction region (28).

Capteur thermoélectrique (12) constitué par une membrane (14) portant plusieurs éléments thermoélectriques (20), ou thermocouples, formant autant d'éléments de pile. Chaque élément de pile est isolé des éléments contigus par des fils métalliques (22, 23), de préférence en or, disposés sur la face avant (25) de la membrane (14), plus précisément sur une couche de passivation (30). Les fils métalliques (22 et 23) sont thermiquement reliés au support (16) de ladite membrane. Les deux fils séparant deux éléments thermoélectriques contigus (20) sont séparés l'un de l'autre par une plage de faible conductivité thermique (28).

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