Thin film actuated mirror array and methods for its manufacture

Details Thin film actuated mirror array and methods for its manufacture Thin film actuated mirror array and methods for its manufacture

G - Physics

02

B

G02B 26/08 (2006.01) G02B 27/00 (2006.01) G02B 27/18 (2006.01) G02F 1/29 (2006.01) H01L 21/64 (2006.01) H04N 9/31 (2006.01)

Patent

CA 2175198

There is provided an array (50) of M x N thin film actuated mirrors (51) for use in an optical section system comprising an active matrix (52), an array of M x N thin film actuating structures (54), each of the thin film actuating structures including at least a thin film layer of a motion-inducing material, a pair of electrodes, each of the electrodes being provided on top and bottom of the thin film motion-inducing layer, am array of M x N supporting members (56), each of the supporting members (56) being used for holding each of the actuating structures (54) in place by cantilevering each of the actuating structures and also for electrically connecting each of the actuating structures and the active matrix, and an array of M x N mirrors (58) for reflecting light beams, each of the mirrors (58) being placed on top of each of the actuating structures (54). An electrical signal is applied across the thin film layer of the motion-inducing material located between the pair of electrodes in each of the actuating structures (54), causing a deformation, which will in turn deform the mirror placed on top of them.

Réseau (50) de M x N miroirs (51) actionnés par couches minces, utilisable dans un système de projection optique. Le réseau comporte une matrice active (52), un réseau de M x N structures (54) d'actionnement par couches minces, chaque structure d'actionnement par couches minces comportant au moins une couche mince en matière d'induction de mouvement, une paire d'électrodes prévues respectivement en dessus et en dessous de la couche mince d'induction de mouvement, un réseau de M x N éléments porteurs (56) dont chacun sert à maintenir en place par effet porte-à-faux chacune des structures d'actionnement (54) ainsi qu'à relier par voie électrique chaque structure d'actionnement à la matrice active, et un réseau de M x N miroirs (58) servant à réfléchir les faisceaux lumineux, chacun des miroirs (58) étant placé sur l'une des structures d'actionnement (54). On soumet à un signal électrique la couche mince en matière d'induction de mouvement située entre la paire d'électrodes dans chacune des structures d'actionnement (54), de manière à provoquer une déformation susceptible, à son tour, de déformer le miroir placé sur chacune desdites structures.

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