Thin film actuated mirror array having dielectric layers

Details Thin film actuated mirror array having dielectric layers Thin film actuated mirror array having dielectric layers

G - Physics

02

B

G02B 26/08 (2006.01) G02B 27/18 (2006.01) H04N 5/74 (2006.01)

Patent

CA 2216557

An array (200) of M x N thin film actuated mirrors (201) includes an active matrix (210), an array of actuating structures (300), each of the actuating structures (300) including an elastic member (235), a second thin film electrode (245), a thin film electrodisplacive member (255) and a first thin film electrode (265), and M x N number of multilayer stacks (400) of thin film dielectric members (401). In addition to providing a protection against chemical or physical attacks on the first thin film electrode (265) which also acts as a mirror for reflecting a light beam, the multilayer stack (400) of thin film dielectric members (401) placed on top of each of the actuating structures (300) provides the maximum reflectance in each of the thin film actuated mirrors (201) to thereby ensure an optimum optical efficiency of the array.

Cette invention concerne un groupement (200) de M x N miroirs (201) commandés par couches minces qui comprend une matrice active (201), un réseau de structures de commande (235) comprenant un élément élastique (235), une seconde électrode en couche mince (245), un élément en couche mince électro-displacif (255) et une première électrode en couche mince (265), ainsi qu'un empilage (400) de M x N éléments diélectriques (401) en couche mince. En plus d'assurer une protection de la première électrode en couche mince (265), qui sert aussi de miroir réfléchissant un faisceau de lumière, contre les agressions chimiques ou physiques, l'empilage (400) d'éléments diélectriques en couche mince (401) sur chacune des structures de commande (300) assure une réflectance maximum dans chacun des miroirs commandés par couches minces (201) pour une efficacité optique optimale du groupement.

Affiliated with

Also associated with

Rating

Thin film actuated mirror array having dielectric layers does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thin film actuated mirror array having dielectric layers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin film actuated mirror array having dielectric layers will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1373148