Thin film material and method for manufacturing the same

C - Chemistry – Metallurgy – 30 – B

Patent

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Details

C30B 29/22 (2006.01) C23C 14/08 (2006.01) H01B 12/06 (2006.01) H01B 13/00 (2006.01)

Patent

CA 2580273

A thin film material which can improve characteristics of a film formed on a board, and manufacturing method thereof are provided. A superconducting wire rod (1) is provided with a board (2), one or more intermediate thin film layers (intermediate layers (3)) formed on the board, and a single crystalline thin film layer (superconducting layer (4)) formed on the intermediate thin film layer (intermediate layer (3)). At least in one of the intermediate thin film layers (intermediate layers (3)), an upper surface (plane (10) to be polished) which faces the single crystalline thin film layer (superconducting layer (4)) is polished.

L~invention porte sur un matériau en film mince susceptible d~améliorer les caractéristiques d~un film constitué sur une carte, et sur un procédé de fabrication dudit matériau. Une tige de métal supraconductrice (1) est pourvue d~une carte (2), d~une ou de plusieurs couches à film mince intermédiaires (couches intermédiaires (3)) formées sur la carte et d~une simple couche à film mince cristallin (couche supraconductrice (4)) formée sur la couche à film mince intermédiaire (couche intermédiaire (3)). Au moins dans l~une des couches à film mince intermédiaires (couches intermédiaires (3)), une surface supérieure (plan (10) à polir) faisant face à la simple couche à film mince cristallin (couche supraconductrice (4)) est polie.

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