Thin film moisture sensing elements and process for the...

Details Thin film moisture sensing elements and process for the... Thin film moisture sensing elements and process for the...

G - Physics

01

N

356/197, 73/71

G01N 25/64 (2006.01) G01N 27/416 (2006.01) G01N 27/42 (2006.01)

Patent

CA 1316715

ABSTRACT OF THE DISCLOSURE A solid state, thin film moisture sensing element is disclosed. The sensing element is fabricated by thin film deposition of at least a pair of two layer electrodes on an insulating surface. The active surface of the element is then coated with a layer of hygroscopic material and placed in a diffusion limiting housing to complete the sensing element assembly.

590423

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