Thin-film multilayered electrodes and method of fabricating...

H - Electricity – 01 – P

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H01P 3/08 (2006.01) H01P 1/203 (2006.01) H01P 3/18 (2006.01) H01P 7/08 (2006.01) H05K 1/02 (2006.01)

Patent

CA 2184022

A thin-film multilayered electrode of a high frequency electromagnetic field coupled type is disclosed. The thin-film multilayered electrode comprises thin-film conductors and dielectric thin films alternately stacked on a dielectric substrate so that a plurality of TEM mode transmission lines are multilayered. A film thickness of each of the dielectric thin films isset so that phase velocities of TEM waves which propagate through at least two of the plurality of TEM mode transmission lines are made substantially equal to each other, and a film thickness of each of the thin-film conductors isset so as to be smaller than a skin depth of a frequency which is used so that electromagnetic fields of at least two of the plurality of TEM mode transmission lines are coupled with each other. The thin-film conductors include at least one adhesive layer having a large adhesion strength at one or more of interfaces between the dielectric substrate and the thin-film conductor and the interfaces between the thin film conductors and the dielectric thin films.

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