Thin film platinum resistance thermometer with high...

Details Thin film platinum resistance thermometer with high... Thin film platinum resistance thermometer with high...

H - Electricity

01

C

117/64, 73/72, 1

H01C 3/04 (2006.01) G01K 7/18 (2006.01) H01C 1/028 (2006.01) H01C 7/02 (2006.01)

Patent

CA 1266803

ABSTRACT OF THE DISCLOSURE A thin film platinum resistance thermometer capable of operation at elevated temperatures includes a benign dielectric layer covering the thin film platinum resistance temperature sensing element and a barrier layer overlying the dielectric layer The barrier layer which is preferrably titanium dioxide, resists diffusion of contaminants which would alter the electrical characteristics of the sensing element while permitting diffusion of oxygen through the barrier layer

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