Thin-film releasing apparatus

Details Thin-film releasing apparatus Thin-film releasing apparatus

H - Electricity

05

K

154/1

H05K 3/02 (2006.01) B26F 3/00 (2006.01) B29C 63/00 (2006.01) B32B 7/06 (2006.01) G03F 7/16 (2006.01) H05K 13/00 (2006.01)

Patent

CA 1290672

Abstract A thin-film releasing apparatus in which a portion of a thin-film is released from a surface of a substrata on which the thin film is stuck, the remaining portion of thin film is then released starting from the released portion thereof and the thus released thin film is then removed. The apparatus comprises a first thin film conveyance system for releasing the remaining portion of the thin film from the thin film by nipping the thin film at the initially released portion thereof and for conveying the thus released thin film upwardly from the surface of the substrate simultaneously, and a second thin-film conveyance system for mounting thereon the thin film conveyed by the first thin film conveyance system and for conveying the mounted thin film in a direction intersecting a conveyance direction of the substate.

585907

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