G - Physics – 01 – B
Patent
G - Physics
01
B
G01B 11/06 (2006.01)
Patent
CA 2563777
A system and method for analyzing the characteristics of a thin film is provided. The current invention extends the capability of IR sensors to measure thin films through configuring a plurality of detection channels with appropriately chosen filters. With the multichannel infrared sensor, the characteristic signature of interference fringes can be detected simultaneously with, or instead, of absorption-based measurements.
L'invention concerne un système et un procédé permettant d'analyser les caractéristiques d'une couche mince. La présente invention permet d'augmenter la capacité des capteurs infrarouges à mesurer des couches minces, par la configuration d'une pluralité de canaux de détection au moyen de filtres choisis de manière appropriée. Les capteurs infrarouges multicanaux permettent de détecter la signature caractéristique de franges d'interférence en même temps que des mesures basées sur l'absorption, ou à la place de ces mesures.
Axelrod Steve
Germanenko Igor N.
Gowling Lafleur Henderson Llp
Honeywell International Inc.
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