Thin magnetic film deposition process

Details Thin magnetic film deposition process Thin magnetic film deposition process

H - Electricity

01

F

H01F 41/14 (2006.01) H01F 41/20 (2006.01)

Patent

CA 2352829

A deposition system for depositing magnetic materials on substrates including a magnetic material deposition source. Magnets are used in the system to optimally orient the deposited magnetic material on the substrates and a low energy discharging apparatus is used to provide adequate energy for the magnetic material to optimally orient.

L'invention concerne un système de dépôt permettant de déposer des matières magnétiques sur des substrats comprenant une source de dépôt de matières magnétiques. Dans ce système, des aimants permettent d'obtenir une orientation optimale de la matière magnétique déposée sur les substrats et un appareil de décharge de faible énergie permet de fournir l'énergie appropriée à l'orientation optimale de la matière magnétique.

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