Three-dimensional dynamic ram cell

H - Electricity – 01 – L

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Details

356/25, 352/82.4

H01L 27/10 (2006.01) G11C 11/34 (2006.01) H01L 27/04 (2006.01)

Patent

CA 1222064

THREE-DIMENSIONAL DYNAMIC RAM CELL Abstract of the Invention This invention relates generally to Dynamic Random Access Memory (DRAM) cells and more particularly relates to a DRAM cell wherein the storage capacitor of the cell is disposed in a trench formed in a semiconductor substrate. Still more particularly it relates to a DRAM cell wherein the substrate is heavily doped and forms the counterelectrode of the storage capacitor while a heavily doped polycrystalline plug disposed in the trench forms the electrode of the storage capacitor. The DRAM cell includes an access transistor which is disposed over and in registry with the storage capacitor. The electrode of the latter is connected directly to the source of the access transistor.

481724

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