Time base comprising an integrated micromechanical ring...

H - Electricity – 03 – B

Patent

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Details

H03B 5/30 (2006.01) G01C 19/56 (2006.01)

Patent

CA 2389980

There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator (4) supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate. The ring resonator comprises a central post (5) extending from the substrate along the axis of rotation, and a free-standing oscillating structure (6) including an outer ring (60) coaxial with the axis of rotation, and a plurality of spring elements (62) disposed symmetrically around the central post and connecting the outer ring to the central post.

L'invention concerne une base de temps comprenant un résonateur (4) et un circuit électronique intégré (3) servant à faire osciller le résonateur et à produire, en réaction à cette oscillation, un signal ayant une fréquence déterminée. Le résonateur est un résonateur annulaire micromécanique intégré (4) placé au-dessus d'un substrat (2) et conçu pour osciller autour d'un axe de rotation (O) pratiquement perpendiculaire au substrat. Il comprend une colonne centrale (5) partant du substrat et s'étendant le long de l'axe de rotation, ainsi qu'une structure oscillante libre (6) comprenant un anneau externe (60) coaxial à l'axe de rotation et une pluralité d'éléments ressorts (62) disposés symétriquement autour de la colonne centrale et reliant l'anneau externe à la colonne centrale.

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