Tin oxide based gas sensors and method for their manufacture

Details Tin oxide based gas sensors and method for their manufacture Tin oxide based gas sensors and method for their manufacture

G - Physics

01

N

G01N 27/12 (2006.01) H01L 49/00 (2006.01)

Patent

CA 2172515

A method for fabricating gas sensors having reproducible gas sensitivity characteristics and the gas sensors so produced. The method comprises the steps: a) hydrolysis of sterically hindered tin(IV) alkoxide dissolved in a polar organic solvent in the presence of a polymer of relatively low molecular weight having a functional group capable of coordinating to tin; b) treatment of the resulting solution with a strong mineral acid to remove the polymer; c) isolation of the solid suspension; d) deposition and subsequent heat treatment at temperatures below 500 °C of an amount of the solid on a suitable substrate to produce a gas sensor head and e) sensitization of the gas sensor head.

L'invention concerne un procédé de fabrication de capteurs de gaz présentant des caractéristiques de sensibilité au gaz qui soient reproductibles, ainsi que les capteurs de gaz ainsi produits. Le procédé comprend les étapes suivantes : a) hydrolyse de l'alcoxyde de stannate IV empêché stériquement, dissous dans un solvant organique polaire en présence d'un polymère de poids moléculaire relativement faible ayant un groupe fonctionnel pouvant se coordonner à l'étain; b) traitement de la solution résultante avec un acide minéral fort pour enlever le polymère; c) isolation de la suspension solide; d) déposition d'une quantité du solide sur un substrat approprié et traitement thermique subséquent à des températures inférieures à 500 DEG C pour produire une tête de capteur de gaz et e) sensibilisation de cette tête.

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