Tomographic imaging by an interferometric immersion microscope

Details Tomographic imaging by an interferometric immersion microscope Tomographic imaging by an interferometric immersion microscope

G - Physics

01

B

G01B 9/02 (2006.01)

Patent

CA 2617983

The invention relates to a device for tomographically imaging an image object comprising a light source whose coherence length is substantially equal to the thickness of the image object slice and an interferometric imaging system which consists of at least one objective lens, reference mirror, and light beam separating means. Said invention is characterised in that the interferometric system is arranged in such a way that the objective lens defines a first focus setting plane at the level of the analysable object layer and a second focus setting plane defines it at the level of the reference mirror, said interferometric system comprises at least one type of compensating medium positioned between said second focus setting plane and separating means, the thickness and optical index of the compensating medium are selected in such a way that the optical path of a light beam emitted from the light source between the first focus setting plane and separating means is substantially equal to the optical path of a light beam between the second focus setting plane and separating means and the dispersion between the first focus setting plane and separating means is substantially equal to the dispersion between the second focus setting plane and separating means.

Elle concerne un dispositif pour l'imagerie tomographique d'un objet à imager, comprenant une source de lumière de longueur de cohérence sensiblement égale à l'épaisseur d'une tranche d'objet à imager, et un système d'imagerie interférométrique comprenant au moins un objectif, un miroir de référence et un moyen de séparation de faisceaux lumineux, caractérisé en ce que ledit système interférométrique est agencé de sorte à ce que ledit objectif définisse un premier plan de mise au point au niveau de la couche de l'objet à analyser, et un second plan de mise au point au niveau dudit miroir de référence, et en ce que ledit système d'imagerie interférométrique comprend au moins un milieu compensateur positionné entre ledit second plan de mise au point et ledit moyen de séparation, l'épaisseur et l'indice optique dudit milieu compensateur étant choisis de sorte que le trajet optique du faisceau lumineux issu de ladite source de lumière entre ledit premier plan de mise au point et ledit moyen de séparation soit sensiblement égal au trajet optique du faisceau lumineux entre ledit second plan de mise au point et ledit moyen de séparation, et de sorte que la dispersion entre ledit premier plan de mise au point et ledit moyen de séparation soit sensiblement égale à la dispersion du faisceau lumineux entre ledit second plan de mise au point et ledit moyen de séparation.

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