Top coat and acid catalyzed resists

Details Top coat and acid catalyzed resists Top coat and acid catalyzed resists

G - Physics

03

F

G03F 7/11 (2006.01) G03F 7/09 (2006.01) G03F 7/16 (2006.01)

Patent

CA 2090039

2090039 9205474 PCTABS00011 A protective material for use as an overcoating film for acid catalyzed resist compositions comprising a polymeric film forming compound, the films of which are impermeable to vapors of organic and inorganic bases.

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